The AW-1008 single-wafer photoresist asher is an automated tool designed as a flexible downstream Microwave plasma photoresist removal system for high-volume wafer fabrication. The AW-1008 is in direct response to manufacturer’s concerns for wafer sensitivity to processing RF damage, uptime, reliability and production-proven technology.
Downstream ashing for NO device damage
Frontside and backside isotropic removal
Bulk resist removal
Single wafer process
High-dose implanted resist
Non-oxidizing metal processing
AW-1008 Key Features:
Production-proven plasma stripper/Asher system technology.
5-15% Uniformity. (Process & Hardware dependent. Optional.)
Fast strip/ash rate. (Process & Hardware dependent. Optional.)
Increased throughput with 3-Axis Integrated Robust Solid Robot.
Frontside and backside isotropic removal.
3x 1kW IR Lamp for uniform heating up to 500C.
75mm-150mm wafer capability.
Endpoint detection w/Allwin21 SLOPE technology (Optional)
2 wafer sizes capability without hardware change if necessary.
Two Fixed cassette stations. Or, one Fixed & one centering station.
Can handle 50um thickness wafer
PC controller with Advanced Allwin21 Software Package
Up to 4 gas lines with MFC’s
2.45GHz 1000W Microwave
Pressure control with Throttle Valve
Touch screen monitor
EMO, Interlocks, and Watchdog function
GEM/SECS II interface, Optional
Made in U.S.A.
AW-1008 Software Key Features:
Real time graphics display, process data acquisition, and analysis.
Closed-loop process parameters control.
Precise parameters profiles tailored to suit specific process requirements.
Programmable comprehensive calibration of all subsystems from within the software. This allows faster, easier calibration, leading to enhanced process results.
Recipe creation. It features a recipe editor to create and edit recipes to fully automate the processing of wafers inside the process chamber.
Validation of the recipe so improper control sequences will be revealed.
Storage of multiple recipes, process data and calibration files so that process and calibration results can be maintained and compared over time.
Passwords provide security for the system, recipe editing, diagnostics, calibration and setup functions
Simple and easy to use menu screen which allow a process cycle to be easily defined and executed.
Troubleshooting features which allows engineers and service personnel to activate individual subassemblies and functions. More I/O, AD/DA “exposure”.
DB-25F parallel (printer) port. The computer interfaces to the Allwin21 system with only one cable: the control interface cable.
The control board inside the machine that translates the computer commands to control the machine has a watchdog timer. If this board looses communication with the control software, it will shut down all processes and halt the system until communication is restored.
GEM/SECS II function (Optional).
Advanced Allwin21 EOP function (Optional)
Wafer Size: 3 ,4,5,6 inch Capability. Multiple wafer size without hardware charge.
Temperature: 150-350 ºC (±2 ºC) capability
Gas Lines: Up to four gas lines with MFCs. Popular MFC Range: 510 SLM O2 and 1 SLM N2.
Asher Rate: 1.5u-5u/min. positive photoresist; >8u/min. negative photoresist
Uniformity: 15%, Process Dependent
Particulate: <0.05 /cm2 (0.03um or greater)
Damage: CV: <0.I V CV-shift for 250A gate oxide
MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better. 95% uptime
*Contact Allwin21 sales for other applications and specifications
Main Frame with Breakers, Relays and Wires
Pentium Class PC with AW Software
Keyboard, Mouse, USB with SW backup and Cables
① 3-4 inch; ② 4-6 inch; ③ 5 inch; ④ 6 inch; ⑤ Others
Fixed Cassette Station
① Two Cassette Stations; ② One Cassette Station
Lamp Heat Module and Quartz Window (3 of 1000W IR lamp)
6 inch Quartz showerhead and 5 inch Diffusion Disk
Chamber Top Plate and Body with TC for Close Loop Temperature Control (CLTC)
Main Control, Distributor PCB and DC
H1-7X10.5 Integrated Solid Robot
Waveguide and Quartz Plasma Tube
Blower for Magnetron and Waveguide
Capacitor, Two Transformers, HV Diode
1000W Air cooling magnetron
1-4 Gas Lines w/ Pneumatic Valve, and MFC
① One MFC; ② Two MFCs; ③ Three MFCs; ④ Four MFCs
AC Box and Lamp Control PCB for Close Loop Temperature Control (CLTC)
Main Vacuum Valves. Two, one for Fast and one for slow pump down
Front EMO, Interlocks
15-inch Touch Screen GUI
EOP Module with PCB
GEM/SECS II function (Software)
Lamp Tower Alarm function
1.25kW “Absolute” MW Magnetron with water-cooled Waveguide with AGL Power Generator.