The NT series clean robot is designed to give a single robot the reach to tend up to four FOUPs without using a linear axis. The NT series incorporates the next-generation design to handle either 300 mm or 450 mm wafers at a rate of 400 wafers per hour (WPH) without an aligner.
Model Brochure (1.05 MB)Click here to download this file
KAWASAKI ROBOTICS NT620
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Integrated Industrial Technologies, Inc.
221 7th Street, LL
Pittsburgh, Pennsylvania 15238