NIKON P3

  • Product Overview

    The Nikon P3 system is designed for automated pattern profile management and line width roughness monitoring of 300mm wafers with fully incorporated macro defect detection, EBR inspection, and automatic defect classification for unsurpassed performance down to the 55nm node.

  • About Company
    Nikon Metrology, Inc.

    Nikon Metrology, Inc. offers the most complete metrology product portfolio, including Coordinate Measuring Machines, Optical CMMs, 3D laser scanners, X-ray and Computed Tomography inspection systems, Large-Scale measuring machines, indoor GPS for tracking and positioning, metrology software and state-of-the-art vision measuring instruments featuring optical and mechanical 3D metrology solutions. These innovative metrology solutions respond to the advanced inspection requirements of manufacturers active in aerospace, electronics, automotive, medical, consumer and other industries.


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